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Sputter Deposition System
Vendor is expected to provide at least the minimum performance as outlined in the specifications and to meet the performance objectives of the equipment. Additionally, the vendor is expected to perform a functional test, performed by a qualified technician, prior to shipment, as well as provide set-up in the lab upon delivery. The deposited metal film should have good electrical conductivity and the deposited dielectric materials should have dielectric constants as high as possible.
