Scanning White Light Interferometer
FURNISH AND DELIVER: One (1) non-contact scanning white light interferometer for measuring three-dimensional
surface topography of various engineered surfaces that meets or exceeds the following specifications:
Measurement part height: 100 mm
Measurement part weight: 30 kg
Measurement surface reflectivity: 0.1% 100%
X & Y axis travel: 200 mm travel for both axes motorized and programmable
Z axis scan range: 10 mm; motorized and programmable
Vertical measurement resolution: 0.01 nm
Vertical scanning speed: 4.5 mm/min
Optical
o Interferometric objectives: 2.5x, 10x, & 50x
o Field of View Zoom: 0.5x, 1.0x, 2.0x
o Camera array: 640 x 480 pixels
Illumination: Dual LED (two wavelengths)
Measurement Modes: Dual measurement modes both phase-shifting and vertical scanning
Measurement Repeatability: 0.005 nm RMS
Step Height Measurement
o Accuracy: 0.6%
o Repeatability (1 sigma): 0.1%
