Particle Free Turbo Cart
We are looking for vendors with the ability to design and fabricate Ultra High Vacuum piping and integrated gas flow equipment with extremely low particulate contamination. The vendors should also be able to integrate a software control, likely a PLC based system, to properly operate the vacuum system.
The Particle Free Turbo Cart (PFC) is designed to pump down and vent vacuum systems in a slow controlled way. To control the pumping and venting flow two mass flow controllers need to be integrated in the system and in the PLC program.
The assembly of the PFC vacuum system from the turbo to the connection hose should be performed in a class 10 clean room.
The system PLC should be programmed so the cart can safely run unattended for short periods of time. Warning and interlocks have to be put in place to reduce the probability of misuse.
Howard J Wilson, LCLS ll Procurement Team Lead, Phone 6509262769, Email hwilson@slac.stanford.edu
