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Optical Profiler
Download the rfp file: optical profiler.docx.
Supply optical profiler per minimum specifications.
Archival Storage and Supervisory Systems. System operates in a Windows XP environment or better Window 07.
The Optical Profiler should be supported by white-light and green light vertical scanning and phase
shifting interferometric measurements. Optional measurement mode should be available to provide
sub nanometer z resolution, with long scan measurements
Vertical resolution ≤ 0.1nm
Step Height Accuracy within uncertainty of NIST standards
Step Height Repeatability must be ≤ 0.1%
etc...
