NANO-Master PC Sputter Down System
This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. The solicitation number is 0011375450 and is issued as a Request for Quote (RFQ), unless otherwise indicated herein. The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2019-05. The associated North American Industrial Classification System (NAICS) code for this procurement is 334111 with a small business size standard of 1,000.00 employees. This requirement is a [ Small Business ] set-aside and only qualified offerors may submit bids. The solicitation pricing on www.UnisonMarketplace.com will start on the date this solicitation is posted and will end on 2019-09-16 17:00:00.0 Eastern Time or as otherwise displayed at www.UnisonMarketplace.com. FOB Destination shall be Natick, MA 01760The APG - Natick SPS requires the following items, Brand Name Only (Exact Match), to the following: LI 001: Part ID # NSC-40000
NANO-MASTER stand alone PC Controlled sputter down system with touch screen monitor and LabVIEW software. Capable of sequential sputtering of three materials without breaking vacuum, full
safety interlocks, recipe driven and adjustable gun to platen distance Capable of DC, RF and reactive sputtering.
Vac. Chamber: 14b SS cube chamber with 8b door and 5b window and CF flanges configuration.
Sources: Includes three off axis 2b planar magnetrons on sliding seals with auto shutter and fiber optic
home detection position. Magnetrons are 2.6b from the center and magnetrons to platen distance is 7b
maximum. They can be moved up and down between 4b to 7b with sliding seals to adjust the uniformity or deposition rate.
Substrate Holder: 6b substrate holder, rotating at 3 and 10 RPM. Plated heated up to 300B0C
Power Supply: 1KW DC power supply for sputtering metals and 600W RF power supply with auto tuner for sputtering dielectrics.
Thickness Monitor: Multi film thickness monitor with single crystal sensor.
MFCbs: 200 sccm Ar, 100sccm O2 and 100sccm N2. PC controlled pneumatic shut off valve and SS gas lines.
Pump: Pfeiffer Hipace 1200 1240 l/sec turbomolecular pump backed up with 2015SD mechanical
pump.
Pressure control: Automatic pressure control through turbo speed control.
Base Pressure: 8 x10-8 Torr in a clean system.
Gauge: Edwardbs wide range gauge. N2 slow and fast Vent
Size: 26" x 44b SS cabinet.
Input Power: 208VAC, 30AMP/phase, 50/60 Hz,
Facility Requirement: 2gpm at 50PSI deionized water and D-Size N2 tank to actuate the pneumatics and venting.
Installation and Training: Three days visit for installation and training
Shipping and Insurance: Freight charges and insurance included, 1, EA;Solicitation and Buy Attachments***Question Submission: Interested Offerers must submit any questions concerning the solicitation at the earliest time possible to enable the Buyer to respond. Questions must be submitted by using the 'Submit a Question' feature at www.UnisonMarketplace.com. Questions not received within a reasonable time prior to close of the solicitation may not be considered.***For this solicitation, APG - Natick SPS intends to conduct an online competitive reverse auction to be facilitated by the third-party reverse auction provider, Unison, Inc. Unison Marketplace has developed an online, anonymous, browser based application to conduct the reverse auction. An Offeror may submit a series of pricing bids, which descend in price during the specified period of time for the aforementioned reverse auction. APG - Natick SPS is taking this action in an effort to improve both vendor access and awareness of requests and the agency's ability to gather multiple, competed, real-time bids. All responsible Offerers that respond to this solicitation MUST submit the pricing portion of their bid using the online exchange located at www.UnisonMarketplace.com. There is no cost to register, review procurement data or make a bid on www.UnisonMarketplace.com. Offerers that are not currently registered to use www.UnisonMarketplace.com should proceed to www.UnisonMarketplace.com to complete their free registration. Offerers that require special considerations or assistance may contact Marketplace Support at 1.877.933.3243 or via email at marketplacesupport@unisonglobal.com. Offerers may not artificially manipulate the price of a transaction on www.UnisonMarketplace.com by any means. It is unacceptable to place bad faith bids, to use decoys in the www.UnisonMarketplace.com process or to collude with the intent or effect of hampering the competitive www.UnisonMarketplace.com process. Should Offerers require additional clarification, notify the point of contact or Marketplace Support at 1.877.933.3243 or marketplacesupport@unisonglobal.com.Use of Unison Marketplace: Buyers and Sellers agree to conduct this transaction through Unison Marketplace in compliance with the Unison Marketplace Terms of Use. Failure to comply with the below terms and conditions may result in offer being determined as non-responsive.New Equipment ONLY; NO remanufactured or "gray market" items. All items must be covered by the manufacturer's warranty.Bid MUST be good for 30 calendar days after close of Buy.Shipping must be free on board (FOB) destination CONUS (Continental U.S.), which means that the seller must deliver the goods on its conveyance at the destination specified by the buyer, and the seller is responsible for the cost of shipping and risk of loss prior to actual delivery at the specified destination.This solicitation requires registration with the System for Award Management (SAM) at the time an offer or quotation is submitted, excluding the exceptions outlined in FAR 4.1102(a). Registration information can be found at www.sam.gov.No partial shipments are permitted unless specifically authorized at the time of award.The selected Offeror must comply with the following commercial item terms and conditions, which are incorporated herein by reference: FAR 52.212-1, Instructions to Offerors - Commercial Items, applies to this acquisition; FAR 52.212-3, Offeror Representations and Certifications - Commercial Items - the selected offeror must submit a completed copy of the listed representations and certifications; FAR 52.212-4, Contract Terms and Conditions - Commercial Items; FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items, paragraph (a) and the following clauses in paragraph (b): 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.225-13, 52.232-34.The selected Offeror must comply with the following commercial item terms and conditions, which are incorporated herein by reference: FAR 52.211-17, 52.212-4, 52.204-10, 52.209-6, 52.222-3, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.222-41, 52.223-15, 52.223-16, 52.225-3, 52.225-13, 52.232-36, 52.211-16, 52.217-9, 52.232-8, 52.233-4 AND DFARS 252.201-7000, 252.203-7000, 252.203-7002, 252.204-7000, 252.204-7002, 252.204-7003, 252.204-7004 Alt A, 252.204-7012, 252.211-7003, 252.225-7001, 252.225-7002, 252.225-7012, 252.225-7048, 252.232-7003, 252.232-7010, 252.246-7000, 252.247-7023 Alt I.The full text of the referenced FAR clauses may be accessed electronically at http://www.acqnet.gov/far.
Name: Client Services, Title: Client Services, Phone: 1.877.933.3243, Fax: 703.422.7822, Email: Clientservices@fedbid.com;
